Prufi
review-mask-fitSupplied evidence required

Actual installed mask fit

Offline review with additional files and records

Scope and limits

Compares complete designated planar mask/workpiece interfaces, datum-relative placement and supplied fit tolerances.

This review is available through the separate offline tools. It does not run automatically when you upload a STEP file and requires the additional inputs described below.

Required inputs

Complete installed mask/workpiece/fixture CAD, full interface/backing faces, datums and qualified tolerance/deformation records.

Assessment limits

Supported flat polygonal interfaces aligned to the model axes only; no seal pressure, leakage, adhesion, coating exclusion or deformation prediction.